Biography
Tsubasa Imamura is a Senior Researcher at the Research & Development Group, Hitachi, Ltd., where he leads the development of electron microscopes.He received a Ph.D. in Electronic Engineering from Nagoya University in 2021.
Prior to joining Hitachi, he worked at Toshiba, Toshiba Memory Corporation, and Kioxia Corporation, accumulating a total of 14 years of industry experience, including approximately 10 years in dry etching process development for 3D NAND devices.His research interests include semiconductor manufacturing processes, as well as gas etching and plasma etching processes.He has published four peer-reviewed journal articles and holds seven patents.