| role | name | affiliation |
|---|---|---|
| Organizing Committee Chair | Noriaki Matsunaga | Applied Materials Japan, Inc. |
|
Assistant Organizing Committee Chair (Previous Year’s Chair) |
Takeyasu Saito | Osaka Metropolitan University |
|
Executive Committee Chair (Organization, Finance, Public Relations) |
Shunichi Hizume | Lam Research GK |
| Executive Vice Chair (Organization) | Takahisa Tanaka | Keio University |
| Executive Vice Chair (Finance) | Kan Shimizu | Sony Semiconductor Solutions Corporation |
| Executive Vice Chair (Public Relations) | Yutaka Nishioka | ULVAC, Inc. |
| General Affairs Committee Chair | Tadashi Fukuda | Tokyo Institute of Technology |
| General Affairs Vice Chair | Atsuhiro Tsukune | The University of Tokyo |
| General Affairs Committee Member | Takeshi Momose | Kumamoto University |
| General Affairs Committee Member | Eriko Yoshikawa | TANAKA PRECIOUS METAL TECHNOLOGIES Co., Ltd. |
| Finance Committee Chair | Yasuhisa Kayaba | Tokyo Electron Limited |
| Financial Vice Chair | Naoko Kato | IBM Research-Tokyo |
| Public Relations Committee Chair | Hiroshi Yamamoto | JX Metals Corporation |
| Public Relations Vice Chair | Hidemi Suemori | Hitachi High-Tech Corporation |
| Program Committee Chair | Takashi Matsumoto | Tokyo Electron Technology Solutions Ltd. |
| Program Committee Vice Chair | Hiroto Ohtake | Applied Materials Inc. |
| Program Committee Vice Chair | Keisuke Suzuki | Kyushu Institute of Technology |
| Program Committee Vice Chair | Kazunari Kurita | Kyushu University |
| Tutorial Committee Chair | Naoki Takeguchi | Sandisk Corporation |
| Tutorial Committee Vice Chair | Hideharu Shimizu | Nippon Sanso Corporation |
| Special Committee Member (Silicon Technology) | Takeyasu Saito | Osaka Metropolitan University |
| Special Committee Member (International Affairs) | Xun Gu | ASM Japan |
| Program Committee Member | Daisuke Watanabe | KIOXIA Corporation |
| Program Committee Member | Kan Takeshita | Mitsubishi Chemical Corporation |
| Program Committee Member | Naoko Kato | IBM Research-Tokyo |
| Program Committee Member | Fumihiro Inoue | Yokohama National University |
| Program Committee Member | Seiji Muranaka | Renesas Electronics Corporation |
| Program Committee Member | Eiichiro Sudo | Tokyo Electron Ltd. |
| Program Committee Member | Takafumi Fukushima | Tohoku University |
| Program Committee Member | Masaya Kawano | The University of Tokyo |
| Program Committee Member | Hideki Shimizu | SCREEN Holdings Co., Ltd. |
| Program Committee Member | Hidemi Suemori | Hitachi High-Tech Corporation |
| Program Committee Member | Maryam Hosseini | imec |
| Program Committee Member | Takashi Hirotani | Applied Materials Japan |
| Program Committee Member | Yujin Terasawa | Sandisk Corporation |
| Program Committee Member (Advisor) | Shinji Yokogawa | The University of Electro-communications |
| Program Committee Member | Akihiro Shimizu | Ushio Inc. |
| Tutorial Committee Member | Yasuhiro Shimura | EBARA CORPORATION |
| Tutorial Committee Member (Advisor) | Seiichi Kondo | Resonac Corporation |
| Tutorial Committee Member | Masayoshi Imai | |
| Tutorial Committee Member | Takashi Matsumoto | Tokyo Electron Technology Solutions Ltd. |
| Public Relations Committee Member | Kazuhiko Endo | Tohoku University |