Advanced Metallization Conference 2021
30thAnniversary, Asian Session

Invited Speakers
[Conference Plenary Speakers]
  Dr. Akihisa Sekiguchi (Tokyo Electron Ltd.)
  Dr. Eric Beyne (IMEC)

[Invited Speakers (Organized Session)]
1) Advanced Integration and Processes
  Dr. Jonathan Reid (Lam Research Co., Ltd.)

2) Advanced Metallization
  Dr. David M.Thompson (Applied Materials, Inc.)
  Prof. Gregory N. Parsons (NC State University)

3) CMP
  Dr. Manabu Tsujimura (Ebara Corp.)
  Dr. Chao-Chang Arthur Chen (National Taiwan University of Science & Technology, NTUST)

4) Emerging Technology
  Prof. Shi-Li Zhang (Uppsala University, Sweden)
  Dr. Huiming Bu (IBM Research)
  Prof. Qing-Tai Zhao (Forschungszentrum Jülich)

5) Thin films and dielectrics
  Dr. Sean King (Intel Corp.)

6) 3D, TSV, PKG
  Prof. Chih Chen (National Yang Ming Chiao Tung University)
  Prof. Tadahiro Kuroda (The University of Tokyo)

Notation based on the Specified Commercial Transaction Act