Advanced Metallization Conference 2021
30thAnniversary, Asian Session


Special Guest Committee Members
Special Chair Kazuya Masu Tokyo Institute of Technology
Special Vice Chair Shigeaki ZaimaMeijo University
Special Vice Chair Takayuki OhbaTokyo Institute of Technology
Special committee Manabu TsujimuraEBARA CORPORATION
Special committee Nobuyoshi KobayashiNagoya University
Special committee Shoso ShingubaraKansai University
Special committee Takashi YodaTokyo Institute of Technology
Special committee Yukihiro ShimogakiThe University of Tokyo
Special committee Kazuyoshi UenoShibaura Institute of Technology
Special committee Tomoji NakamuraTokyo Institute of Technology
Special committee Katsuro FukozuTokyo Institute of Technology
Executive Committee Members
　
General Chair Kazuyoshi Maekawa Renesas Electronics Corporation
Vice Chair Hideaki Machida Gas-Phase Growth LTD.
Vice Chair Mayumi B. Takeyama Kitami Institute of Technology
Program Chair Takeyasu Saito Osaka Prefecture University
Program Vice Chair Munehiro Tada NanoBridge Semiconductor, Inc.
General Arrangements Chair Shinji Yokogawa The University of Electro-communications
Financial Chair Kan Shimizu Sony Semiconductor Solutions Corporation
Tutorial Chair Masayoshi Imai EBARA CORPORATION
Publicity Chair Hajime Momoi JX Nippon Mining & Metals Corporation
Specially Appointed for JJAP Special Issues Osamu Nakatsuka Nagoya University
Specially Appointed for JSAP Eiichi Kondoh Yamanashi University
Specially Appointed as representative for Chinese committee Xun Gu ASM Japan

Committee Members
Program Committee Mikhail Baklanov North China University of Technology
Program Committee Xun Gu ASM Japan
Program Committee Fumihiro Inoue Yokohama National University
Program Committee Akihiro Kajita KIOXIA Corporation
Program Committee Jim Leu National Chiao Tung University
Program Committee Jun Luo Chinese Academy of Science
Program Committee Takashi Matsumoto Tokyo Electron Technology Solutions Ltd.
Program Committee Noriaki Matsunaga Applied Materials Japan, Inc.
Program Committee Hideya Matsuyama Socionext Inc.
Program Committee Takeshi Momose The University of Tokyo
Program Committee Keisuke Suzuki Kyushu Institute of Technology
Program Committee Kan Takeshita Mitsubishi Chemical Corporation
Tutorial Committee Shunichi Hizume Lam Research Coproration
Tutorial Committee Naoki Takeguchi Western Digital Corporation
Tutorial Committee Atsuhiro Tsukune Taiyo Nippon Sanso Corporation
General Arrangements Committee Yoshiyuki Kikuchi ASM Japan
Publicity Committee Kazuhiko Endo AIST
Publicity Committee Yasushi Higuchi ULVAC, Inc.
Publicity Committee (US) Takeshi Nogami IBM Corporation
Publicity Committee (Korea） Young-Chang Joo Seoul National University
Publicity Committee (Korea） Jin-Goo Park Hanyang University
Publicity Committee (Taiwan） Chih-Chien Liu United Microelectronics Corp.
Publicity Committee (Taiwan） Lih J. Chen National Tsing Hua University
Publicity Committee (Singapore） Chuan Seng Tan Nanyang Technological University
Publicity Committee (US) Hong Jin Kim GLOBALFOUNDRIES
Publicity Committee (China) Xinping Qu Fudan University
Publicity Committee (China) Jing Zhang North China University of Technology

International Advisory Board
Young-Chang Joo Seoul National University
Chao Zhao Chinese Academy of Science
Mikhail Baklanov North China University of Technology
Jim Leu National Chiao Tung University

Advisory Members
Nobuyoshi Kobayashi Nagoya University
Yukio Yasuda Tohoku University
Takamaro Kikkawa Hiroshima University
Takayuki Ohba Tokyo Institute of Technology
Shigeaki Zaima Meijo University
Tomohiro Ohta Institute for Future Engineering
Kazuya Masu Tokyo Institute of Technology.
Manabu Tsujimura EBARA CORPORATION
Shoso Shingubara Kansai University
Takashi Yoda Tokyo Institute of Technology
Yukihiro Shimogaki The University of Tokyo
Seiichi Kondo Showa Denko Materials Co.,Ltd.
Kazuyoshi Ueno Shibaura Institute of Technology
Hisao Kawasaki Quantum Biosystems Inc.
Jyunichi Koike Tohoku University
Takenao Nemoto Tokyo Electron Ltd.

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