| Program Committee |
Mikhail Baklanov |
North China University of Technology |
| Program Committee |
Xun Gu |
Western Digital Corporation |
| Program Committee |
Akihiro Kajita |
KIOXIA Corporation |
| Program Committee |
Yasuhiro Kawase |
Mitsubishi Chemical Corporation |
| Program Committee |
Jim Leu |
National Chiao Tung University |
| Program Committee |
Jun Luo |
Chinese Academy of Science |
| Program Committee |
Takashi Matsumoto |
Tokyo Electron Technology Solutions Ltd. |
| Program Committee |
Noriaki Matsunaga |
Applied Materials Japan, Inc. |
| Program Committee |
Hideya Matsuyama |
Socionext Inc. |
| Program Committee |
Keisuke Suzuki |
Kyushu Institute of Technology |
| Program Committee |
Naoki Takeguchi |
Western Digital Corporation |
| Tutorial Committee |
Shunichi Hizume |
Lam Research Coproration |
| Tutorial Committee |
Masayoshi Imai |
EBARA CORPORATION |
| General Arrangements Committee |
Dai Ishikawa |
ASM Japan |
| General Arrangements Committee |
Takeshi Momose |
The University of Tokyo |
| Publicity Committee |
Yasushi Higuchi |
ULVAC, Inc. |
| Publicity Committee (US) |
Takeshi Nogami |
IBM Corporation |
| Publicity Committee (Korea) |
Young-Chang Joo |
Seoul National University |
| Publicity Committee (Korea) |
Jin-Goo Park |
Hanyang University |
| Publicity Committee (Taiwan) |
Chih-Chien Liu |
United Microelectronics Corp. |
| Publicity Committee (Taiwan) |
Lih J. Chen |
National Tsing Hua University |
| Publicity Committee (Singapore) |
Chuan Seng Tan |
Nanyang Technological University |
| Publicity Committee (US) |
Hong Jin Kim |
GLOBALFOUNDRIES |
| Publicity Committee (China) |
Xinping Qu |
Fudan University |
| Publicity Committee (China) |
Jing Zhang |
North China University of Technology |