About ADMETAPlus 2018
 Important Dates
 Call for Papers
 Special issue of JJAP
 Invited Speaker
 Conference Program
 Oral Presentation
 Poster Presentation
 Top Page
Advanced Metallization Conference 2018
28th Asian Session
  Conference Topics of Interest

Low-k Dielectric: CVD, ALD, SOD, Film Properties, Interface Control, New Materials, Dielectric Structures (Air Gap), Selective Deposition as New Patterning Strategy, Surface Confined Activation of Low-k Materials, Metrology, etc.
Metallization: PVD, CVD, ALD, Plating, Barrier Metal, Seed and Nucleation Layer, Supercritical Fluid, Reflow
CMP: Planarization Technology, Slurry, Pad, Dress, End Point Detection, Cleaning, Anti-corrosive Technology, etc.
Integration: Interconnection Structure and Performance, Parasitic Capacitance, Reliability Technology, Testing and Analysis, Alterative Integration Approach based on Subtractive Approach, etc.
Reliability Science and Failure Analysis: EM, SIV, TDDB, Defect Detection and Analysis, Failure Mechanism and Modeling.
Contact: Silicide, Interface, Solid Phase Reaction, Shallow Junction, Crystal Properties, Carrier Transport, Parasitic Resistance, Nanocontact etc.
MEMS/RF: Interconnection Structure and Materials, Packaging, Fabrication Process Technology, Device Design, etc.
Emerging Technology: Active Wiring, Power Electronics, Silicon Photonics, Flexible Electronics, Energy Harvesting, etc.
Backend Device Technology: Technology for Embedding Devices (MRAM, PCRAM, ReRAM, DRAM, etc.), Materials and Processing of Magnetics, Phase-Change and Resistive-Change Devices, Electrodes, Metallization, etc.
Nanocarbon: Graphene, Carbon Nanotubes, Deposition, Integration, Electrical Characteristics, Reliability, Evaluation, Analysis, etc.
3D and Packaging: TSV, TMV, Stacking Method (CoW, WoW), Thinning, Planarization, Bonding, Bump, Stress and Thermal Analysis, Sealing, Cooling, Reliability etc.
Modeling and Simulation: Advanced Metallization and IC Thermal Management.

Notation based on the Specified Commercial Transaction Act

(C) ADMETA Plus 2018 all rights reserved.