| October 8, 2013 |
Session 1: Opening Session
Chairperson: E. Kondoh |
| 9:30-9:50 |
Opening Remarks: J. Koike, Chair of Asian Session [Tohoku
Univ.]
Award Ceremony : F. Ito [Toshiba] |
9:50-10:30
(1-1) |
Keynotes: Aiming at Voltage Reduction of Devices for
Low -power Electronics [LEAP] S. Kimura |
10:30-11:10
(1-2） |
Keynotes: Flash Memory Technology For the Zetabyte
Era [SanDisk (Japan) ] A. Koike |
Session 2: Process Integration
Chairperson: K. Maekawa |
11:10-11:40
(2-1） |
Invited: Advanced Metallization Concepts and Impact
on Reliability [Globalfoundaries] M. Hauschildt,
B. Hintze, M. Gall, F. Koschinsky, A. Preusse,
T. Bolom, O. Aubel, G. Talut., and E. Zschech
|
11:40-12:00
(2-2） |
Improvement of Cu gap-fill performance for
isolation pattern [Renesas Electronics] A.
Nakajima, Y. Yamamoto, T. Nakamura, and T.
Usami |
12:00-12:20
(2-3） |
Reflow behavior of Cu -Mn in LSI line patterns
[Tohoku Univ.] T. Saito, D. Ando, Y. Sutou,
and J. Koike |
| 12:20-13:30 |
(Lunch Break) |
Session 3: Low-k
Chairpersons: T. Nemoto |
13:30-14:00
(3-1） |
Invited: Low-k Dielectric Chip Package Interaction
and Mechanical Reliability [IBM] Xiao Hu
Liu, T.M. Shaw, and G. Bonilla |
14:00-14:30
(3-2） |
Invited: Plasma-enchanced ALD Dielectric Barrier
for Extending Low-k Scaling < 2.3 [ASM
Japan] N. Kobayashi, A. Kobayashi, A. Nakano,
D. Ishikawa, and K. Matsushita |
14:30-14:50
(3-3） |
The Use of Monoenergetic Positron Beams for
Characterizing the Porosity of Complex Stacks
of Porous Low-k with ALD Metal Films [1Univ. of Tsukuba, 2IMEC, 3AIST] A. Uedono1, P. Verdonck2, A. Delabie2, J.Swerts2, T.Witters2, T. Conard2, M. R. Baklanov2, S. V. Elshocht2, N. Oshima3, and R. Suzuki3 |
| 14:50-15:00 |
(Break 10 min) |
Session 4: Nanocarbon
Chairperson: T. Sakai / S. Noda / S. Sato
/ K. Ueno |
15:00-15:30
(4-1） |
Invited: Prospects of Nano Carbons and Emerging 2D-Crystals
for Next-Generation Green Electronics [UCSB]
K. Banerjee |
15:30-15:50
(4-2） |
Transfer Process and Contact Resistance of
Multilayer Graphene Wires on Tungsten Plugs
for Local Interconnects [AIST] M. Sato, M.
Takahashi, M. Nihei, S. Sato, and N. Yokoyama |
15:50-16:10
(4-3） |
Characterization of 10-layer Graphene Interconnects
Fabricated by 10-time Transfer of Single-layer
CVD-grown Graphene [AIST] H. Nakano, D. Kondo,
B. Zhou, K. Hayashi, K. Yagi, M. Takahashi,
M. Sato, S. Sato, and N. Yokoyama |
| 16:10-16:20 |
(Break 10 min) |
16:20-16:50
(4-4） |
Invited: Growth and Integration of Graphene and CNT
for 3D Interconnect Applications [LEAP] T.
Sakai, Y. Yamazaki, T. Matsumoto, D. Nishide,
M. Kitamura, M. Wada, T. Ishikura, T. Saito,
M. Katagiri, H. Miyazaki, M. Suzuki, L. Zhang,
A. Isobayashi, A. Sakata, M. Watanabe, N.
Sakuma, and A. Kajita |
16:50-17:10
(4-5） |
Bromine Doping of Multilayer Graphene for
Low Resistance Interconnects [1Shibaura Institute of Technology, 2LEAP] R. Kosugi1, K. Imazeki1, A. Aozasa1, Y. Matsumoto1, H. Miyazaki2, N. Sakuma2, A. Kajita2, T. Sakai2, and K. Ueno1 |
17:10-17:30
(4-6） |
Direct Synthesis of Graphene on Dielectric
Substrates by "etching-precipitation"
Method [1Univ. of Tokyo, 2Waseda Univ.] M. Kosaka1,2, S. Takano1, and S. Noda2 |
1730-17:50
(4-7） |
Multilayer Graphene Grown by Chemical Vapor
Deposition at Low Temperatures for Interconnect
Applications [LEAP] M. Katagiri, H. Miyazaki,
Y. Yamazaki, L. Zhang, T. Matsumoto, M. Wada,
A. Kajita, and T. Sakai |
|
| October 9, 2013 |
Session 5: Advanced Metal Processes
Chairperson: M. B. Takeyama / N. Hata |
9:00-9:30
(5-1） |
Invited: [Fabrication of High-Quality and Reliability
Cu Interconnects by Chemical Processes [Univ.
of Tokyo] Y. Shimogaki, H. Kim, H. Shimizu,
K. Shima, and T. Momose |
9:30-9:50
(5-2） |
Cu Coating Inside Ultra High-aspect-ratio
(>130) and Bended Through-hole Using Supercritical
CO2 Fluid [1Univ. of Yamanashi, 2Fujikura] M. Watanabe1, Y. Takeuchi1, T. Ueno1, M. Matsubara1, E. Kondoh1, S. Yamamoto2, N. Kikukawa2, and T.Suemasu2 |
9:50-10:10
(5-3） |
Step Coverage Analysis on Nickel Thin Films
by Hot-wire-assisted ALD [Univ. of Tokyo]
G. Yuan, H. Shimizu, T. Momose, and Y. Shimogaki |
| 10:10-10:30 |
(Break 20 min) |
10:30-11:00
(5-4） |
Invited: Interface adhesion energy and apparent adhesion
strength between Cu and insulation layers
in damascene metallization systems [Nagoya
Inst. of Tech., JST] S. Kamiya |
11:00-11:20
(5-5） |
Room-temperature Intermixing at Cu/SiO2 Interface in Reliable Metallization by Adopting
SiO2 Surface Dope and Noble Metal Catalyzation
[Univ. of Yamanashi] M. Watanabe, A. Teraoka,
and E. Kondoh |
11:20-11:40
(5-6） |
Processing and Characterization of Co-Sn
Compound [1Tokyo Institute of Technology, 2IMEC, 3Intel] M. O1, G. Vakanas2,3, B. Dimcic2, and M. Kajihara1 |
11:40-12:00
(5-7） |
Adsorption Behavior of Poly (Ethylene Glycol)
in the Presence of Different Kinds of Halide
Ions with a Microfluidic Device and an EQCM
[Osaka Pref. Univ.] Y. Tsujimoto, Y. Miyamoto,
N. Okamoto, T. Saito, and K. Kondo |
| 12:00-13:30 |
(Lunch Break) |
Session 6: Reliability and Contacts
Chairperson: O. Nakatsuka / S. Yokogawa |
13:30-14:00
(6-1） |
Invited: Voltage, Temperature and Area Scaling of
Low-k TDDB [1IBM, 2Globalfoundaries] F. Chen1, K. Y. Yiang2, M. Shinosky1, and C. Graas1 |
14:00-14:20
(6-2） |
Lifetime Prediction Model for Stress-induced
Voiding in Cu/low-k Interconnects [Polytechnic
Univ.] S. Yokogawa |
14:20-14:40
(6-3） |
Measurement of Specific Contact Resistivity
by Refined Transmission Line Method [Tohoku
Univ.] B. T. Bae, D. Ando, Y. Sutou, and
J. Koike |
14:40-15:00
(6-4） |
Formation and Crystalline Structure of Ni
Silicides on Si(110) Substrate [Nagoya Univ.]
O. Nakatsuka, M. Hasegawa, K. Kato, N. Taoka,
and S. Zaima |
15:00-15:20
(6-5） |
Thermal Stability of Epitaxial NiGe Layers
Formed on Ge(110) Substrate [Nagoya Univ.]
D. Yunsheng, O. Nakatsuka, N. Taoka, and
S. Zaima |
| 15:20-15:30 |
(Break 10 min) |
Poster Session (15:30-17:00)
Chairperson: E. Kondoh |
| P-1 |
Formation of Mn Barrier Layer on Porous SiOC
by Chemical Vapor Deposition [1Tohoku Univ., 2Ube Industries] Y. Tsuchiya1, Y. Sutou1, J. Koike1, H. Kanato2, and K. Watanuki2 |
| P-2 |
Area-Selective Chemical Vapor Deposition
of Co as a Capping Layer for Cu Inetrconnect
[1Yonsei Univ.] J. Yoon1, B. Jo2, and H. Kim1 |
| P-3 |
Atomic Layer Deposition of Ruthenium Thin
Films Using Isopropylmethylbenzene-cyclohexadiene-ruthenium
and N2/H2 Plasma as a Seed Layer for Cu Electroplating
[1Korea Basic Science Institute, 2Yeungnam University, 3Daegu Gyeongbuk Institute of Science &
Technology, 4University of Ulsan] T. E. Hong1, K.-Y. Mun2, S.-H. Kim2, T. Cheon2, 3, B.-Y. Lim4, and S. Kim4 |
| P-4 |
Cu Filling of 10-nm Trenches by High-magnetic-field
Magnetron Sputtering [Tokyo Univ. of Science]
M. Itoh, Y. Uhara, and S. Saito |
| P-5 |
Deposition of Cu-Ni Alloy Thin Films in Supercritical
Carbon Dioxide Solutions [Univ. of Yamanashi]
M. Rasadujjaman, M. Watanabe, and E. Kondoh |
| P-6 |
A New Cu(ReTaNx ) Copper Alloy Film for Making
Copper Interconnects [Asia-Pacific Institute
of Creativity] C.H.Lin |
| P-7 |
Growth and Diffusion Barrier Properties of
CVD Mn Oxide in a TSV Structure [Tohoku Univ.]
H. Wang, Y. Sutou, J. Koike, K. Lee, J. Bea,
M. Murugesan, T. Fukushima, T. Tanaka and
M. Koyanagi |
| P-8 |
Study of Via Filling Capability of Sn Plating
[JCU] M. Hori，T. Sato，M. Matsumoto，K.
Tokio，and T. Fukushima |
| P-9 |
Characterization of SiNx Film as Insulating
Barrier Applicable to TSV [1Kitami Institute of Technology, 2Fujitsu Laboratories] M. B. Takeyama1, M. Sato1, Y. Kobayashi2, Y. Nakata2, T. Nakamura2, and A. Noya1 |
| P-10 |
Fabrication of Copper/Single-Walled Carbon
Nanotube Composite Films via Electroless
Plating [Shinshu Univ.] T. Osaki, and S.
Arai |
| P-11 |
Growth of High-density Carbon Nanotube Arrays
on Conductive Underlayers at 400 °C Toward
via Interconnects in ULSIs [1Univ. of Tokyo, 2Waseda Univ.] N. Na1,2, Y.-G. So1, Y. Ikuhara1, and S. Noda2 |
| P-12 |
Study on Sapphire CMP Using Fullerenol Mixed
Slurry - Effect on the Size of Silica and
Diamond Fine Particles- [1Kyushu Institute of Tech., 2National Taiwan Univ. of Sci. and Tech] K.
Suzuki1, S. Kawakita1, P. Khajornrungruang1, and K. Kimura1,2 |
| P-13 |
GeSn Film Deposition Using Metal Organic
Precursors [1Meiji Univ., 2Gas-phase Growth, 3Toyota Technological Institute] K. Suda1, S. Ishihara1, H. Machida2, M. Ishikawa2, H. Sudoh2, Y. Ohshita3, and A. Ogura1 |
| P-14 |
Temperature Dependence of Resistance of Conductive
Nano-filament Formed in Ni/NiOx/Pt ReRAM
[Kansai Univ.] S. Otsuka, Y. Hamada, T. Shimizu,
and S. Shingubara |
| 17:00-17:20 |
(Break 20 min) |
| Sponserd Banquet (17:20-18:50) |
|
| October 10, 2013 |
Session 7: Backend Device Technologies
Chairperson: M. Tada / C. S. Hwang |
9:00-9:30
(7-1） |
Invited: Atomic Layer Deposition and chemical Vapor
Deposition of Ru, RuO2, and SrRuO3 [Seoul National Univ.] C. S. Hwang |
9:30-10:00
(7-2） |
Invited: Mixed Ionic Electronic Conduction (MIEC)
Based Access Devices for 3-D Multi-layer
Crosspoint Memory [IBM] K. Virwani, G. W.
Burr, R. S. Shenoy, G. Ho, C. T. Rettner,
A. Padilla, R. S. King, K. Nguyen, A. N.
Bowers, M. Jurich, M. BrightSky, E. A. Joseph,
A. J. Kellock, N. Arellano, B. N. Kurdi,
and K. Gopalakrishnan |
10:00-10:20
(7-3） |
A Wafer Warpage Reduction by Material Property
Control and Cu-RDL Design Optimization for
Wafer-level White LED Package [Toshiba] H.
Tomizawa, A. Kojima, M. Shimada, Y. Akimoto,
M. Shimojuku, H. Furuyama, Y. Sugizaki and
H. Shibata |
| 10:20-10:40 |
(Break 20 min) |
10:40-11:10
(7-4） |
Invited: A Novel MTJ for Embedded STT-MRAM with a
Dummy Free Layer and Dual Tunnel Junctions
[LEAP] K. Tsunoda, H. Noshiro, C. Yoshida,
Y. Yamazaki, A. Takahashi, Y. Iba, A. Hatada,
M. Nakabayashi, T. Takenaga, M. Aoki, and
T. Sugii |
11:10-11:30
(7-5） |
Phase Transition Characteristics of GeCu2Te3 Film for PCRAM [1Tohoku Univ, 2AIST] Y. Sutou1, Y. Saito2, and J. Koike1 |
11:30-11:50
(7-6） |
A Phase Change Memory Using Confined GeTe/Sb2Te3 Superlattice Deposited by Chemical Vapor
Deposition [LEAP] T. Morikawa, M. Kitamura,
T. Ohyanagi, M. Tai, M. Kinoshita, K. Akita,
and N. Takaura |
11:50-12:10
(7-7） |
Aluminum - doped Zinc Oxide Electrodes for
PbLaZrTiOx capacitors [1Osaka Pref. Univ., 2Osaka Univ.] Y. Takada1, T. Tsuji1, N. Okamoto1, T. Saito1, K. Kondo1, T. Yoshimura1, N. Fujimura1, K. Higuchi2, A. Kitajima2, and A. Oshima2 |
| 12:10-13:20 |
(Lunch Break) |
Session 8: Chemical Mechanical Polishing
Chairperson: S. Kondo / Y. Yamada |
13:20-13:50
(8-1） |
Invited: FEOL 300-mm Roadmap; Challenges and Successes
[Intel] J. Sorooshian |
13:50-14:20
(8-2） |
Invited: The Role of CMP Technologies for Embedded
Memories [Renesas Electronics] T. Taiji |
14:20-14:40
(8-3） |
Identification of Nonlinear Viscoelasticity
of CMP Pads [Nagoya Univ.] N. Suzuki, A.
Kato, M. Asaba, and E. Shamoto |
14:40-15:00
(8-4） |
Study on Variable Rotation Polishing Method
in CMP Process - Influence of the Asperity
on Polishing Pad to Increase Material Removal
Rate - [1Kyushu Institute of Tech., 2National Taiwan Univ. of Sci. and Tech.]
P. Phaisalpanumas1, K. Suzuki1, K. Kimura1,2 and P. Khajornrungruang1 |
| 15:00-15:20 |
(Break 20 min) |
Session 9: 3D challenges
Chairpersons: T. Ohoba / T. Saito |
15:20-15:50
(9-1） |
Invited: 3DIC Integration Technology and Challenge
[ITRI] T. K. Ku, C. H. Lin, P. J. Tzeng,
E. H. Chen, T. C. Hsu, S. C. Chen, C. C.
Wang, J. C. Chen, C. C. Chen, Y. C. Hsin,
S. C. Liao, P. C. Chang, Y. M. Lin, and Y.
H. Chang |
15:50-16:20
(9-2） |
Invited: 3D Challenges - Low Temperature Bonding using
Surface Activation Processes [Univ. of Tokyo]
T. Suga |
16:20-16:40
(9-3） |
Impact of Back Grind Damage on Si Wafer Thinning
for 3D Integration [1Fujitsu Laboratories, 2Tokyo Institute of Technology, 3Disco, 4Toray Research Center, 5Univ. of Tsukuba] Y. Mizushima1,2, Y. Kim2,3, T. Nakamura1, R. Sugie4, H. Hashimoto4, A. Uedono5, and T. Ohba2 |
16:40-17:00
(9-4） |
Development of Bumpless COW Using <20
μm Thick 1 Gbit DDR3 SDRAM for Tera-Scale
Application [1Tokyo Institute of Technology, 2DISCO, 3Dai Nippon Printing, 4Fujitsu Laboratories] N. Maeda1, H. Kitada1, K. Fujimoto3, Y. S. Kim1, S. Kodama2, S. Yoshimi3, Y. Mizushima4, K. Masu1, and T. Ohba1 |
17:00-17:20
(9-5） |
Fluctuation of Lattice Spacing around Trough
Si Vias in Wafer -on -wafer Structures [1Nagoya Unv., 2Fujitsu Laboratories, 3Tokyo Institute of Technology, 4Univ. of Tokyo] N. Taoka1, O. Nakatsuka1, Y. Mizushima2,3, H. Kitada2,3, Y. S. Kim3,4, T. Nakamura2, T. Ohba 3,4 , and S. Zaima1 |
17:20-17:40
(9-6） |
A Novel TSV Exposure Process Comprising Si/Cu
Grinding, Electroless Ni-B Plating, and Wet
Etching of Si [1AIST, 2Apprecia Technology, 3Okamoto Machine Tool Works] N. Watanabe1, M. Aoyagi1, D, Katagawa2, T. Bandoh3, and E. Yamamoto3 |
| 17:40-17:50 |
Closing Remarks: E. Kondoh [Yamanashi Univ.] |
|
