ADMETA 2025
Advanced Metallization Conference 2025
ADMETA 2024 Award
*** Award ***
Point Defects in NiAl Interconnects Probed by Positron Annihilation Spectroscopy and Atom Probe Tomography
A. Uedono (University of Tsukuba)
*** Technical Achievement Award ***
SiO2 Etching Mechanism by Vapor HF/ Methanol
Hiroto Ohtake (Hitachi High-Tech Corporation)
*** Poster Award ***
Consideration of the effect of suppressing additives in copper wiring formation using EIS measurement
Naoki Okamoto (Osaka Metropolitan University)
Liquid Film Thickness and Agitation Distribution of Two-Fluid Jet Impingement Surface for Post-CMP Cleaning
Naoto Doi (Shizuoka University)
