{"id":49,"date":"2023-02-03T13:42:37","date_gmt":"2023-02-03T04:42:37","guid":{"rendered":"https:\/\/www.admeta.org\/wp2023\/?post_type=cpt_admeta&p=49"},"modified":"2023-02-08T16:57:37","modified_gmt":"2023-02-08T07:57:37","slug":"tutorial-2022-ja","status":"publish","type":"cpt_admeta","link":"https:\/\/www.admeta.org\/2023\/cpt_admeta\/tutorial-2022-ja","title":{"rendered":"2022-8-ja-\u30c1\u30e5\u30fc\u30c8\u30ea\u30a2\u30eb"},"content":{"rendered":"\r\n

\u30c1\u30e5\u30fc\u30c8\u30ea\u30a2\u30eb\u8b1b\u6f14<\/h1>\r\n\r\n
\r\n
\r\n\r\n

2022\u5e7410\u670812\u65e5 9:15\uff5e17:30 (JST)
<\/strong><\/p>\r\n

\u306f\u3058\u3081\u306b\u30009:15\uff5e9:20\u3000<\/p>\r\n\r\n

\u8b1b\u6f14\u2460\u30009:20\uff5e10:05\u3000
\r\n \u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u304b\u3089\u307f\u305f\u534a\u5c0e\u4f53\u5e02\u5834\u52d5\u5411<\/span>
\r\n \u682a\u5f0f\u4f1a\u793eSUMCO\u3000 \u5c0f\u68ee \u9686\u884c \u69d8<\/spann>
\r\n \u534a\u5c0e\u4f53\u306e\u57fa\u677f\u6750\u6599\u3067\u3042\u308b\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30fc\u30cf\u306e\u8996\u70b9\u304b\u3089\u3001\u534a\u5c0e\u4f53\u304a\u3088\u3073\u534a\u5c0e\u4f53\u642d\u8f09\u88fd\u54c1\u306b\u3064\u3044\u3066\u5e02\u5834\u3068\u6280\u8853\u306e\u52d5\u5411\u3092\u8003\u5bdf\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2461\u300010:05\uff5e10:50\u3000
\r\n \u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u306e\u57fa\u790e\u3068\u6700\u65b0\u52d5\u5411<\/span>
\r\n \u30ad\u30aa\u30af\u30b7\u30a2\u682a\u5f0f\u4f1a\u793e\u3000\u5b89\u85e4 \u5f70\u5f66 \u69d8
\r\n \u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u7d30\u5316\u3092\u727d\u5f15\u3057\u3066\u304d\u305f\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u6280\u8853\u306e\u57fa\u790e\u3068\u6700\u8fd1\u306e\u6280\u8853\u52d5\u5411\u306b\u3064\u3044\u3066\u89e3\u8aac\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2462\u300011:00\uff5e11:45\u3000
\r\n CMP\u3068\u6d17\u6d44\u306e\u79d1\u5b66<\/span>
\r\n \u682a\u5f0f\u4f1a\u793e\u30d5\u30b8\u30df\u30a4\u30f3\u30b3\u30fc\u30dd\u30ec\u30fc\u30c6\u30c3\u30c9\u3000\u68ee\u6c38 \u5747 \u69d8
\r\n \u30c7\u30d0\u30a4\u30b9\u306e\u9ad8\u96c6\u7a4d\u5316\u30fb\u4f4e\u30b3\u30b9\u30c8\u5316\u306e\u9032\u5c55\u306b\u4f34\u3044\u3001CMP\u3068\u6d17\u6d44\u6280\u8853\u306b\u306f\u5e38\u306b\u9032\u5316\u304c\u6c42\u3081\u3089\u308c\u308b\u3002\u6280\u8853\u306e\u9032\u5316\u3092\u652f\u3048\u308b\u306e\u306f\u305d\u306e\u6839\u5e95\u306b\u3042\u308b\u30b5\u30a4\u30a8\u30f3\u30b9\u306e\u7406\u89e3\u3067\u3042\u308b\u3002\u672c\u8b1b\u6f14\u3067\u306fCMP\u3068\u6d17\u6d44\u306e\u30e1\u30ab\u30cb\u30ba\u30e0\u3001\u4e26\u3073\u306b\u8ab2\u984c\u89e3\u6c7a\u306e\u8003\u3048\u65b9\u3092\u89e3\u8aac\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2463\u300011:45\uff5e12:30\u3000
\r\n Cu\u914d\u7dda\uff1a\u57cb\u3081\u8fbc\u307f\u6280\u8853\u3068\u9ad8\u4fe1\u983c\u6027\u306e\u78ba\u4fdd<\/span>
\r\n \u30eb\u30cd\u30b5\u30b9\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u682a\u5f0f\u4f1a\u793e\u3000\u6751\u4e2d \u8aa0\u5fd7 \u69d8
\r\n Cu\u306e\u5fae\u7d30\u914d\u7dda\u306e\u57cb\u3081\u8fbc\u307f\u306b\u5fc5\u8981\u306a\u30b9\u30d1\u30c3\u30bf\u3068Cu\u3081\u3063\u304d\u30d7\u30ed\u30bb\u30b9\u306e\u8ab2\u984c\u3084\u5bfe\u7b56\u3092\u7d39\u4ecb\u3059\u308b\u3068\u3068\u3082\u306b\u3001\u9ad8\u4fe1\u983c\u6027\u3092\u78ba\u4fdd\u3059\u308b\u305f\u3081\u306e\u6280\u8853\u3092\u7d39\u4ecb\u3057\u8aac\u660e\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2464\u300013:30\uff5e14:15\u3000
\r\n \u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u6280\u8853\u306e\u73fe\u72b6\u3068\u5c06\u6765 \u30fcDRAM \u3068 NAND \u30d5\u30e9\u30c3\u30b7\u30e5\u30fc<\/span>
\r\n \u682a\u5f0f\u4f1a\u793e \u65e5\u7acb\u30cf\u30a4\u30c6\u30af\u3000\u677e\u5d0e \u671b \u69d8
\r\n \u65e2\u5b58\u69cb\u9020\u3092\u5ef6\u547d\u3057\u3066\u5fae\u7d30\u5316\u3092\u63a8\u3057\u9032\u3081\u308b DRAM, \u7a4d\u5c64\u6570\u5897\u52a0\u3068\u591a\u5c64\u5316\u306e\u9032\u5c55\u306b\u3088\u308a\u9ad8\u96c6\u7a4d\u5316\u306e\u9053\u3092\u9032\u3080 3D NAND \u30d5\u30e9\u30c3\u30b7\u30e5\u3002\u5de8\u5927\u5e02\u5834\u3092\u5f62\u4f5c\u308b\u4e21\u30c7\u30d0\u30a4\u30b9\u306e\u73fe\u72b6\u3068\u5c06\u6765\u50cf\u3092\u30c7\u30d0\u30a4\u30b9\u6280\u8853\u306e\u8996\u70b9\u304b\u3089\u4fef\u77b0\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2465\u300014:15\uff5e15:00\u3000
\r\n \u53cd\u5fdc\u6027\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\uff08RIE\uff09\u3068\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\uff08ALE\uff09\u6280\u8853\u306e\u57fa\u790e\u3068\u5fdc\u7528<\/span>
\r\n \u5927\u962a\u5927\u5b66\u3000\u6d5c\u53e3 \u667a\u5fd7 \u69d8
\r\n \u672c\u8b1b\u6f14\u3067\u306f\u3001\u53cd\u5fdc\u6027\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\uff08RIE\uff09\u3068\u539f\u5b50\u5c64\u30a8\u30c3\u30c1\u30f3\u30b0\uff08ALE\uff09\u306e\u6280\u8853\u7684\u80cc\u666f\u3068\u6982\u8981\u3092\u8ff0\u3079\u305f\u5f8c\u3001\u305d\u306e\u8868\u9762\u53cd\u5fdc\u6a5f\u69cb\u306e\u57fa\u790e\u304b\u3089\u6700\u5148\u7aef\u5fdc\u7528\u307e\u3067\u3092\u89e3\u8aac\u3059\u308b\u3002\u7279\u306b\u3001ALE\u306b\u95a2\u3057\u3066\u71b1\u7684\u304a\u3088\u3073\u30d7\u30e9\u30ba\u30de\u652f\u63f4ALE\u7814\u7a76\u306e\u6700\u65b0\u52d5\u5411\u3092\u8b70\u8ad6\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2466\u300015:10\uff5e15:55\u3000
\r\n CMOS \u30c7\u30d0\u30a4\u30b9\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u6280\u8853\u306e\u5c06\u6765\u306e\u30c8\u30ec\u30f3\u30c9<\/span>
\r\n IMEC\u3000\u5800\u53e3 \u76f4\u4eba \u69d8
\r\n CMOS\u30c7\u30d0\u30a4\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3092\u7d9a\u3051\u308b\u305f\u3081\u306b\u3001\u5f93\u6765\u306e\u30d4\u30c3\u30c1\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u306b\u52a0\u3048\u3066\u3001\u30c7\u30d0\u30a4\u30b9\uff08FinFET\u304b\u3089Nanosheet\u3001CFET\uff09\u3001\u914d\u7dda\uff08Front side interconnect\u304b\u3089Back side power delivery\u3001Back side interconnect\uff09\u3001\u30c1\u30c3\u30d7\uff083D-SIP\u304b\u30893D-IC\uff09\u306b\u304a\u3051\u308b\u5fae\u7d30\u306a\uff13\u6b21\u5143\u5316\u304c\u91cd\u8981\u306b\u306a\u3063\u3066\u304f\u308b\u3002\u3053\u306e\u8b1b\u6f14\u3067\u306f\u3001\u5c06\u6765\u306e\u5fae\u7d30\uff13\u6b21\u5143\u5316\u3092\u7528\u3044\u305fCMOS\u30c7\u30d0\u30a4\u30b9\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u306b\u5fc5\u8981\u306a\u6280\u8853\u3092\u8b70\u8ad6\u3059\u308b\u3002<\/p>\r\n\r\n

\u8b1b\u6f14\u2467\u300015:55\uff5e16:40\u3000
\r\n PECVD\u30fbPEALD\u306e\u57fa\u790e<\/span>
\r\n \u65e5\u672c\u30a8\u30fc\u30fb\u30a8\u30b9\u30fb\u30a8\u30e0\u682a\u5f0f\u4f1a\u793e\u3000\u85e4\u7530 \u654f\u660e \u69d8
\r\n \u30d7\u30e9\u30ba\u30de\u3092\u4f7f\u3063\u305fCVD\u304a\u3088\u3073ALD\u306e\u6210\u819c\u539f\u7406\u3068\u534a\u5c0e\u4f53\u30c1\u30c3\u30d7\u88fd\u9020\u306b\u304a\u3051\u308b\u4e3b\u306a\u7528\u9014\u3092\u89e3\u8aac\u3059\u308b\u3002 <\/p>\r\n\r\n

\u8b1b\u6f14\u2468\u300016:40\uff5e17:25\u3000
\r\n \u4e09\u6b21\u5143\u96c6\u7a4d\u6280\u8853\u306e\u6280\u8853\u52d5\u5411<\/span>
\r\n \u6a2a\u6d5c\u56fd\u7acb\u5927\u5b66\u3000\u4e95\u4e0a \u53f2\u5927 \u69d8
\r\n \u8fd1\u5e74\u306e\u4e09\u6b21\u5143\u96c6\u7a4d\u6280\u8853\u306b\u304a\u3051\u308b\u6280\u8853\u30c8\u30ec\u30f3\u30c9\u3092\u7d39\u4ecb\u3057\u3001\u305d\u306e\u4e2d\u3067\u3082\u91cd\u8981\u3068\u306a\u308b\u30d7\u30ed\u30bb\u30b9\u306b\u95a2\u3057\u3066\u8a73\u7d30\u3092\u89e3\u8aac\u3059\u308b\u3002<\/p>\r\n\r\n

\u304a\u308f\u308a\u306b\u300017:25\uff5e17:30\u3000<\/p>\r\n <\/div>\r\n\r\n\r\n

\u30c1\u30e5\u30fc\u30c8\u30ea\u30a2\u30eb\u306f\u65e5\u672c\u8a9e\u3067\u884c\u308f\u308c\u307e\u3059\u3002<\/p> \r\n

\u30c1\u30e5\u30fc\u30c8\u30ea\u30a2\u30eb<\/a>    \u8b1b\u6f14\u30d7\u30ed\u30b0\u30e9\u30e0<\/a><\/p>\r\n<\/div>\r\n\r\n\r\n","protected":false},"featured_media":0,"template":"","txo_year":[13],"class_list":["post-49","cpt_admeta","type-cpt_admeta","status-publish","hentry","txo_year-13"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.admeta.org\/2023\/wp-json\/wp\/v2\/cpt_admeta\/49","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.admeta.org\/2023\/wp-json\/wp\/v2\/cpt_admeta"}],"about":[{"href":"https:\/\/www.admeta.org\/2023\/wp-json\/wp\/v2\/types\/cpt_admeta"}],"wp:attachment":[{"href":"https:\/\/www.admeta.org\/2023\/wp-json\/wp\/v2\/media?parent=49"}],"wp:term":[{"taxonomy":"txo_year","embeddable":true,"href":"https:\/\/www.admeta.org\/2023\/wp-json\/wp\/v2\/txo_year?post=49"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}